Ion transport mechanisms in a filtered cathodic vacuum arc (FCVA) system

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1996, Pages 962-966

  Bilek, M M M ^a   Yin, Y ^a   McKenzie, D R ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DEPOSITION; ELECTRIC ARCS; ELECTRIC CURRENTS; ION BEAMS; MAGNETIC FIELD EFFECTS; MAGNETIC FILTERS; PLASMAS; THIN FILMS; TRANSPORT PROPERTIES; VACUUM APPLICATIONS;

DEPOSITION RATE; FILTERED CATHODIC VACUUM ARC SYSTEM; GRAPHITE CATHODE; LANGMUIR PROBE MEASUREMENTS; MAGNETIC MIRROR EFFECT; VACUUM ARC PLASMAS;

IONS;

EID: 0029706999     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)