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Volumn 2779, Issue , 1996, Pages 610-615
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Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC PROPERTIES;
ELASTICITY;
ELECTROSTRICTION;
INTELLIGENT MATERIALS;
MICROLITHOGRAPHY;
PIEZOELECTRIC DEVICES;
SENSORS;
SOL-GELS;
THICK FILMS;
THIN FILMS;
VIBRATION CONTROL;
BIMORPH ACTUATORS;
CLOSED LOOP CONTROL;
DIELECTRIC CONSTANTS;
SMART MICROSYSTEMS;
ACTUATORS;
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EID: 0029706470
PISSN: 0277786X
EISSN: None
Source Type: None
DOI: 10.1117/12.237025 Document Type: Conference Paper |
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Times cited : (8)
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References (4)
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