Synthesis and oxidation kinetics of sol-gel and sputtered tantalum nitride thin films

Materials Research Society Symposium - Proceedings

Volumn 410, Issue , 1996, Pages 295-300

  Kraus, Gerald T ^a   Oldweiler, Cory S ^a   Giannelis, Emmanuel P ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ELECTRIC RESISTANCE MEASUREMENT; NITRIDES; OXIDATION; REACTION KINETICS; SOL-GELS; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

NITRIDATION; PARABOLIC OXIDATION; QUARTIC OXIDATION; SHEET RESISTANCE MEASUREMENT;

TANTALUM COMPOUNDS;

EID: 0029705689     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)