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Volumn 410, Issue , 1996, Pages 295-300
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Synthesis and oxidation kinetics of sol-gel and sputtered tantalum nitride thin films
a
a
Cornell Univ
*
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
ELECTRIC RESISTANCE MEASUREMENT;
NITRIDES;
OXIDATION;
REACTION KINETICS;
SOL-GELS;
SPUTTER DEPOSITION;
SYNTHESIS (CHEMICAL);
THERMAL EFFECTS;
THIN FILMS;
NITRIDATION;
PARABOLIC OXIDATION;
QUARTIC OXIDATION;
SHEET RESISTANCE MEASUREMENT;
TANTALUM COMPOUNDS;
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EID: 0029705689
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (11)
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