Ion implant technology for 6H-SiC MESFET's digital ICs

Annual Device Research Conference Digest

Volumn , Issue , 1996, Pages 158-159

  Lam, M P ^a   Kornegay, K T ^a   Cooper Jr , J A ^a   Melloch, M R ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DIGITAL INTEGRATED CIRCUITS; ION IMPLANTATION; LOGIC CIRCUITS; LOGIC GATES; MESFET DEVICES; OHMIC CONTACTS; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR DOPING; SILICON CARBIDE; VANADIUM;

CHANNEL MOBILITY; METAL INTERCONNECTIONS; SCHOTTKY BARRIER CONTACTS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029703646     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)