Magnetically actuated CMOS micromachined cantilever-in-cantilever devices

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 1996, Pages 84-87

  Shen, B ^a   Robinson, A M ^a   Allegretto, W ^a   Ma, Yuan ^a   Yu, Bing ^a   Hu, Ming ^a  

^a GE MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FABRICATION; MAGNETIC FIELDS; MICROMACHINING; NATURAL FREQUENCIES; PRODUCT DESIGN; SCANNING ELECTRON MICROSCOPY;

ANGULAR DEFLECTION; CANTILEVER IN CANTILEVER DEVICES; LORENTZ FORCES; STATIC DEFLECTION;

ELECTROMECHANICAL DEVICES;

EID: 0029702360     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)