Self-limiting growth kinetics of 3D coherent islands

Materials Research Society Symposium - Proceedings

Volumn 399, Issue , 1996, Pages 271-281

  Chen, K M ^a   Jesson, D E ^a   Pennycook, S J ^a   Thundat, T ^a   Warmack, R J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; MOLECULAR BEAM EPITAXY; PHASE EQUILIBRIA; REACTION KINETICS; SEMICONDUCTOR GROWTH; STRUCTURE (COMPOSITION); SURFACE PROPERTIES; THREE DIMENSIONAL;

ISLAND SIZE DISTRIBUTION; METASTABLE TWO DIMENSIONAL STRAINED FILMS; POST DEPOSITION ANNEALING; SELF LIMITING GROWTH KINETICS; THREE DIMENSIONAL COHERENT ISLANDS;

SEMICONDUCTING FILMS;

EID: 0029701844     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)