Synthesis of aluminum nitride by intensified plasma assisted processing

Proceedings of the 1995 9th International Conference on Surface Modification Technologies

Volumn , Issue , 1996, Pages 421-436

  Adjaottor, A A ^a   Meletis, E I ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AUGER ELECTRON SPECTROSCOPY; DIFFUSION; MICROSTRUCTURE; NITRIDES; NITRIDING; STOICHIOMETRY; SURFACE PROPERTIES; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM NITRIDE; CONVENTIONAL ION NITRIDING; GLOW DISCHARGE INTENSIFICATION; INTENSIFIED PLASMA ASSISTED PROCESSING;

PLASMA APPLICATIONS;

EID: 0029700671     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)