New polymer precursors to SiNCB materials

Materials Research Society Symposium - Proceedings

Volumn 410, Issue , 1996, Pages 185-190

  Wideman, T ^a   Su, K ^a   Remsen, E E ^a   Zank, G A ^a   Sneddon, L G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BORON COMPOUNDS; CERAMIC MATERIALS; CONDENSATION; CRYSTALLINE MATERIALS; PYROLYSIS; SILANES; SILICON; SILICON CARBIDE; SILICON NITRIDE; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

BORAZINE/SILAZANE BACKBONE COPOLYMERS; HEXAMETHYLCYCLOTRISILAZANE; POLYMER PRECURSORS; TRIS(TRIMETHYLSILYLAMINO) SILANE;

COPOLYMERS;

EID: 0029699493     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)