Reproducibility in the fabrication of undoped semi-insulating InP

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1996, Pages 43-46

  Uchida, M ^a   Kainosho, K ^a   Ohta, M ^a   Oda, O ^a  

^a JAPAN ENERGY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; PRESSURE EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

MULTISTEP WAFER ANNEALING; PHOSPHORUS VAPOR PRESSURE;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0029698269     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)