Design and fabrication issues in the development of monolithic micro-optical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 99-107

  Egert, Charles M ^a   Rajic, Slobodan ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO-SENSORS; MONOLITHIC MICRO-OPTICAL SYSTEMS;

DESIGN; ECONOMICS; FABRICATION; SENSORS;

OPTICAL SYSTEMS;

EID: 0029697827     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)