New developments in metal ion implantation by vacuum arc ion sources and metal plasma immersion

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 467-477

  Brown, I G ^a   Anders, A ^a   Anders, S ^a   Dickinson, M R ^a   MacGill, R A ^a   Monteiro, O R ^a   Oks, E M ^a   Raoux, S ^a   Wang, Z ^a   Yushkov, G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ION BEAMS; ION SOURCES; METALS; MORPHOLOGY; PLASMAS; STRUCTURE (COMPOSITION); SURFACE TREATMENT; VACUUM TECHNOLOGY;

BEAM FORMATION; DUAL METAL GASEOUS ION SPECIES; MACROPARTICLE FILTERING; METAL PLASMA IMMERSION;

ION IMPLANTATION;

EID: 0029697108     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (54)