Novel rectilinear negative carbon ion beam source for large-area amorphous diamond like carbon coatings

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 629-634

  Sohn, M H ^a   Ahn, Y O ^a   Ko, Y W ^a   Park, Y ^a   Kim, S I ^a  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CESIUM; COATED MATERIALS; DIAMONDS; ION BEAMS; ION BOMBARDMENT;

RECTILINEAR NEGATIVE CARBON ION BEAM SOURCE; SOLID STATE ION BEAM TECHNOLOGY;

ION SOURCES;

EID: 0029696718     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)