Development of an Intelligent Face Grinding Machine to Fabricate Ultraflat Surfaces on Thin, Brittle Substrates

CIRP Annals - Manufacturing Technology

Volumn 45, Issue 1, 1996, Pages 397-400

  Nakao, Masayuki ^a   Hatamura, Yotaro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Conceptual design; Face grinding machine; Intelligent control

Indexed keywords

ACTUATORS; COMPUTER CONTROL; ERROR CORRECTION; GRINDING (MACHINING); INTELLIGENT CONTROL; KNOWLEDGE BASED SYSTEMS; MACHINE DESIGN; POSITION CONTROL; SENSORS; SUBSTRATES;

VERTICAL SPINDLE FACE GRINDING MACHINE;

GRINDING MACHINES;

EID: 0029694419     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63089-3     Document Type: Article

References (6)

1. Structural Configuration and Performances of Machining Environment-Controlled Ultra-Precision Diamond Turning Machine “Capsule”
2. Development of Ultraprecision Machining Center with Closed-Loop Structure and Its Control
3. Development of An Intelligent Machining Center Incorporating Active Compensation for Thermal Distortion
4. Actual Conceptual Design Process for an Intelligent Machining Center