Self-calibrating barrier-detector microsystem in standard silicon circuit technology

IEEE International Symposium on Industrial Electronics

Volumn 2, Issue , 1995, Pages 867-871

  Kuratli, C ^a   Huang, Q ^a   Brand, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINED SILICON MEMBRANES; READ OUT ELECTRONICS; SELF CALIBRATING BARRIER DETECTOR; SILICON CIRCUIT TECHNOLOGY; ULTRASOUND BARRIER SYSTEM;

BIPOLAR INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; READOUT SYSTEMS; RESONATORS; SIGNAL RECEIVERS; SILICON SENSORS; TRANSMITTERS; ULTRASONICS;

MICROELECTRONIC PROCESSING;

EID: 0029547488     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)