Process technology for 1 giga-bit DRAM

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 907-910

  Lee, K P ^a   Park, Y S ^a   Ko, D H ^a   Hwang, C S ^a   Kang, C J ^a   Lee, K Y ^a   Kim, J S ^a   Park, J K ^a   Roh, B H ^a   Lee, J Y ^a   Kim, B C ^a   Lee, J H ^a   Kim, K N ^a   Park, J W ^a   Lee, J G ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAPACITORS; CD-ROM; COATINGS; DIELECTRIC MATERIALS; RELIABILITY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; TITANIUM COMPOUNDS;

HALF TONE PHASE SHIFTING MASK; OPTICAL PROXIMITY CONTROL; PROCESS TECHNOLOGY; SELF ALIGNED CONTACT; SHALLOW TRENCH ISOLATION;

RANDOM ACCESS STORAGE;

EID: 0029547112     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)