Silicon active microvalves using buckled membranes for actuation

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 305-308

  Popescu, Dan S ^a   Dascalu, Dan C ^a   Elwenspoek, Miko ^a   Lammerink, Theo ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; BUCKLING; CHEMICAL VAPOR DEPOSITION; DIFFUSION; ETCHING; FLOW CONTROL; MEMBRANES; PHOTOLITHOGRAPHY; RESISTORS; SILICON WAFERS; SPUTTERING; STRESSES;

ALUMINUM RING LAYER; BUCKLED MEMBRANES; ELECTROSTATIC ACTUATION; MICROVALVES; POLYSILICON RESISTORS; THERMAL ACTUATION;

VALVES (MECHANICAL);

EID: 0029546845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)