Overview of metrology requirements based on the 1994 National Technology Roadmap for Semiconductors

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1995, Pages 50-60

  Diebold, Alain C ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT TESTING; LITHOGRAPHY; PROCESS CONTROL; PRODUCT DESIGN; SEMICONDUCTOR DEVICE MANUFACTURE; SOCIETIES AND INSTITUTIONS; SPECIFICATIONS;

METROLOGY TOOLS; NATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS (NTRS);

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029546241     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)