Diode-based thermal RMS converter with on-chip circuitry fabricated using standard CMOS technology

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 154-157

  Klaassen, Erno H ^a   Reay, Richard J ^a   Kovacs, Gregory T A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; ELECTRIC CONVERTERS; ELECTRODES; ETCHING; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR DIODES; SINGLE CRYSTALS; SUBSTRATES; THERMAL CONDUCTIVITY;

AUTOMATIC GAIN CONTROL; ELECTROCHEMICAL ETCH STOP; OXIDE NITRIDE DIAPHRAGM; POLYSILICON SUBSTRATE; TEMPERATURE SENSORS; TETRAMETHYLAMMONIUM HYDROXIDE;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029545763     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)