Active substrate membrane probe card

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 709-712

  Leung, Justin ^a   Zargari, Masoud ^a   Wooley, Bruce A ^a   Wong, S Simon ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CMOS INTEGRATED CIRCUITS; DEPOSITION; ETCHING; LITHOGRAPHY; NUCLEATION; POLYIMIDES; POLYMERIC MEMBRANES; PROBES; SEMICONDUCTING SILICON; SUBSTRATES; TUNGSTEN;

ALUMINUM INTERCONNECTION; MONOLITHIC ACTIVE MEMBRANE PROBE CARD; NEEDLE PROBES; TEST CIRCUITRY; WAFER LEVEL PROBING;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 0029545624     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)