Two layer hermetic-like coating process for on-wafer encapsulation of GaAs MMIC's

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 1995, Pages 128-131

  Kaleta, T ^a   Varmazis, C ^a   Chinoy, P ^a   Carney, J P ^a   Jansen, N ^a   Loboda, M ^a  

^a M/A COM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CERAMIC MATERIALS; ELECTRONICS PACKAGING; ENCAPSULATION; FREQUENCY RESPONSE; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; POLYMERS; RELIABILITY; SEALING (FINISHING); SEMICONDUCTING GALLIUM ARSENIDE; SILICON CARBIDE; SILICON WAFERS;

BENZOCYCLOBUTENE; COATING EFFECTS; HERMETIC EQUIVALENCE; ON WAFER ENCAPSULATION; SPIRAL INDUCTORS;

COATING TECHNIQUES;

EID: 0029545253     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)