Nickel-filled hexsil thermally actuated tweezers

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 376-379

  Keller, Chris G ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTROLESS PLATING; ELECTROSTATIC DEVICES; MECHANISMS; MICROMACHINING; NICKEL; SILICON; TENSILE TESTING;

ELECTROLESS NICKEL; ELECTROSTATIC MICROGRIPPERS; HEXSIL; MOLDED MICROMACHINE; POLYSILICON; TESTING MACHINE; TWEEZERS;

GRIPPERS;

EID: 0029543056     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)