Silicon carbide as a mechanical material

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 186-189

  Krotz, G ^a   Legner, W ^a   Wagner, Ch ^a   Moeller, H ^a   Sonntag, H ^a   Mueller, G ^a  

^a DAIMLER AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; DRY ETCHING; ELECTROLYTES; FABRICATION; GROWTH (MATERIALS); HIGH TEMPERATURE PROPERTIES; LOW TEMPERATURE EFFECTS; MECHANICAL PROPERTIES; PRESSURE; SENSORS; SILICON; SUBSTRATES;

CAPACITIVE SILICON ACCELEROMETERS; CHEMICAL INERTNESS; PRESSURE SENSORS;

SILICON CARBIDE;

EID: 0029542222     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)