Fast 3D laser micromachining of silicon for micromechanical and microfluidic applications

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 166-169

  Mullenborn, M ^a   Dirac, H ^a   Petersen, J W ^a   Bouwstra, S ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOOPTICAL DEVICES; CHARGE COUPLED DEVICES; DC MOTORS; ETCHING; FLUIDIC DEVICES; LIGHT MODULATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RAPID PROTOTYPING; SEMICONDUCTOR LASERS; SUBSTRATES; THREE DIMENSIONAL;

ARGON LASERS; BEAM SPLITTERS; LASER DIRECT ETCHING; LASER MICROMACHINING; MICROELECTROMECHANICAL SYSTEMS; MICROMOLDING ELECTROPLATING;

SEMICONDUCTING SILICON;

EID: 0029541068     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)