Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers

Journal of Materials Research

Volumn 10, Issue 12, 1995, Pages 2996-2999

  Payne, D A ^a   Clem, P G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC VARIABLES MEASUREMENT; LITHIUM COMPOUNDS; LITHOGRAPHY; MONOLAYERS; PRINTING; SOL-GELS; SUBSTRATES; SURFACES; WAVEGUIDES;

ALKYSILOXANE; DIELECTRIC MEASUREMENTS; DIELECTRIC OXIDE THIN LAYERS; LATTICE MATCHED SUBSTRATES; MICROCONTACT PRINTING; PATTERNING; SELF ASSEMBLED MONOLAYERS; SOL GEL DEPOSITION;

DIELECTRIC MATERIALS;

EID: 0029536661     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1995.2996     Document Type: Article

References (10)

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