TIS uniformity maps of wafers, disks, and other samples

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2541, Issue , 1995, Pages 21-25

  Stover, John C ^a   Bernt, Marvin L ^a   Schiff, Tod F ^a  

^a Scatter Works Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER DISKS; SILICON WAFERS; TOTAL INTEGRATED SCATTER;

MAGNETIC DISK STORAGE; MANUFACTURE; MAPS; MONITORING; ROUGHNESS MEASUREMENT; SEMICONDUCTOR DEVICES; SURFACE PHENOMENA;

LIGHT SCATTERING;

EID: 0029536476     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)