Calibration of microfabricated shear stress sensors

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 443-446

  Pan, Tao ^a   Hyman, Daniel ^a   Mehregany, Mehran ^a   Reshotko, Eli ^a   Willis, Brian ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CAPACITANCE; COMPRESSIBLE FLOW; FABRICATION; INTEGRATED CIRCUITS; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; SEMICONDUCTING SILICON COMPOUNDS; SHEAR STRESS; TRANSDUCERS; WIND TUNNELS;

FLOATING ELEMENT DEFLECTION; LATERAL RESONANT STRUCTURES; MACROSCOPIC FLOW CHANNEL; MICROFABRICATED SHEAR STRESS SENSORS;

SILICON SENSORS;

EID: 0029534563     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)