Arbitrary Lateral Diffusion Profiles

IEEE Transactions on Electron Devices

Volumn 42, Issue 12, 1995, Pages 2226-2230

  Merchant, Steve ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; ION IMPLANTATION; MASKS; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON ON INSULATOR TECHNOLOGY;

ARBITRARY LATERAL DIFFUSION PROFILES; LATERAL DOPING PROFILES;

SEMICONDUCTOR DOPING;

EID: 0029534560     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.477783     Document Type: Article

References (10)

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