Practical microgripper by fine alignment, eutectic bonding and SMA actuation

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 368-371

  Lee, Abraham P ^a   Ciarlo, Dino R ^a   Krulevitch, Peter A ^a   Lehew, Stacy ^a   Trevino, Jimmy ^a   Northrup, M Allen ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALIGNMENT; BONDING; DEPOSITION; FABRICATION; MICROMACHINING; NICKEL ALLOYS; SHAPE MEMORY EFFECT; SILICON WAFERS; STRESSES; THIN FILMS;

EUTECTIC BONDING; GRIPPING FORCE; MICROFABRICATION; MICROGRIPPERS;

GRIPPERS;

EID: 0029521604     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)