Piezoelectric cantilever beams actuated by PZT sol-gel thin film

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 413-416

  Luginbuhl, Ph ^a   Racine, G A ^a   Lerch, Ph ^a   Romanowicz, B ^a   Brooks, K G ^a   de Rooij, N F ^a   Renaud, Ph ^a   Setter, N ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE MEASUREMENT; FINITE ELEMENT METHOD; INTERFEROMETRY; LEAD COMPOUNDS; MATHEMATICAL MODELS; MICROMACHINING; PIEZOELECTRICITY; SEMICONDUCTING SILICON; SOL-GELS; THIN FILMS;

INTERFEROMETRIC DISPLACEMENT MEASUREMENTS; LEAD ZIRCONIUM TITANATE; MACH-ZEHNDER INTERFEROMETERS; PIEZOELECTRIC CANTILEVER BEAMS; PIEZOELECTRIC PARAMETER;

PIEZOELECTRIC MATERIALS;

EID: 0029521571     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)