2.4-in. driver-integrated full-color quarter VGA (320 × 3 × 240) poly-Si TFT LCD by a novel low temperature process using a combination of ELA and RTA technology

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 837-840

  Morimoto, Y ^a   Hirano, K ^a   Abe, H ^a   Kuwahara, T ^a   Hasegawa, I ^a   Yuda, S ^a   Sotani, N ^a   Yoneda, K ^a  

^a SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; ELECTRODES; EXCIMER LASERS; ION IMPLANTATION; LIQUID CRYSTAL DISPLAYS; LOW TEMPERATURE PROPERTIES; SEMICONDUCTING GLASS; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES;

BEAM HOMOGENIZER; EXCIMER LASER ANNEALING; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; LOW TEMPERATURE OXIDE FILM; NOVEL LOW TEMPERATURE PROCESS; POLYCIDE ELECTRODE; SILICIDATION; STORAGE CAPACITOR ELECTRODE; XENON ARC LAMPS;

THIN FILM TRANSISTORS;

EID: 0029520003     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)