Overall system analysis of a CMOS thermal converter

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 112-115

  Jaeggi, D ^a   Funk, J ^a   Haberli, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FEEDBACK; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MEMBRANES; NUMERICAL METHODS; OPTIMIZATION; SIGNAL TO NOISE RATIO; SYSTEM STABILITY; THREE DIMENSIONAL;

AC POWER SENSORS; CMOS THERMAL CONVERTERS; DOUBLE SENSOR STRUCTURE; INTEGRATED MICROSYSTEM; OXIDE NITRIDE MEMBRANE; SOFTWARE PACKAGE SOLIDIS;

SENSORS;

EID: 0029519857     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)