Object positioning using a surface micromachined distributed system

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 396-399

  Goosen, J F L ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; INTEGRATED CIRCUITS; MICROMACHINING; POSITION CONTROL;

DISTRIBUTED SYSTEM; OBJECT POSITIONING; SURFACE MICROMACHINED ACTUATORS;

MATERIALS HANDLING EQUIPMENT;

EID: 0029519370     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)