Novel 3-axis monolithic silicon accelerometer

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 558-561

  Andersson, Gert I ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; VECTORS;

ACCELERATION SENSORS; CARTESIAN SYSTEM; MONOLITHIC SILICON ACCELEROMETER;

ACCELEROMETERS;

EID: 0029517997     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)