Double pass metallization for CMOS aluminum actuators

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 360-363

  Buhler, J ^a   Funk, J ^a   Steiner, F P ^a   Sarro, P M ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; DEPOSITION; ELECTRIC FIELDS; ELECTROSTATIC DEVICES; FABRICATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; PASSIVATION; STRESSES;

DEFLECTABLE MICROMIRRORS; ELECTROSTATIC ALUMINUM ACTUATORS; METALLIZATION;

ACTUATORS;

EID: 0029517686     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)