Microsensor with integrated heat sink and flow guide for gas flow sensing applications

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 520-523

  Qiu, Li ^a   Obermeier, Ernst ^a   Schubert, Axel ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; FLOW OF FLUIDS; FLOWMETERS; HEAT SINKS; PERFORMANCE; RESISTORS; SILICON WAFERS; SUBSTRATES; TEMPERATURE DISTRIBUTION; THERMAL VARIABLES CONTROL; VELOCITY MEASUREMENT;

FLOW GUIDE; GAS FLOW SENSING; INTEGRATED HEAT SINK; MICROSENSOR; SOFTWARE PACKAGE ANSYS FLOTRAN;

SILICON SENSORS;

EID: 0029516645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)