Novel poly-silicon-capped poly-silicon-germanium thin-film transistor

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 513-516

  Tang, Andrew J ^a   Tsai, Julie A ^a   Reif, Rafael ^a   King, Tsu Jae ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; DOPANT ACTIVATION; POLYSILICON THIN FILM TRANSISTORS; SOLID PHASE CRYSTALLIZATION; STATIC RANDOM ACCESS MEMORY;

CELLULAR ARRAYS; CHEMICAL VAPOR DEPOSITION; ELECTRON TRANSPORT PROPERTIES; GATES (TRANSISTOR); INTERFACES (MATERIALS); ION IMPLANTATION; LEAKAGE CURRENTS; RANDOM ACCESS STORAGE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING;

THIN FILM TRANSISTORS;

EID: 0029516208     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)