Thermal simulation of micromachined bridges for integrated pyroelectric sensor arrays

Microelectronic Engineering

Volumn 29, Issue 1-4, 1995, Pages 75-78

  Ploss, B ^a   Lienhard, D ^a   Sieber, F ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; FABRICATION; HEAT LOSSES; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; MICROMACHINING; PYROELECTRICITY; SEMICONDUCTING SILICON; SURFACES;

INTEGRATED PYROELECTRIC SENSOR ARRAYS; MICROMACHINED BRIDGES; PYROELECTRIC MATERIALS; THERMAL SIMULATION;

SENSORS;

EID: 0029515793     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00118-2     Document Type: Article

References (6)

1. A simple technique to interface pyroelectric materials with silicon substrates for infrared detection
2. The optimization of low cost integrated pyroelectric sensor arrays