Scalable low power vertical memory

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 657-660

  Hanafi, Hussein I ^a   Tiwari, Sandip ^a   Burns, Stuart ^a   Kocon, Walter ^a   Thomas, Alan ^a   Garg, Nina ^a   Matsushita, Kaoru ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; FABRICATION; GATES (TRANSISTOR); LITHOGRAPHY; NONVOLATILE STORAGE; THIN FILMS; TRANSISTORS;

FLOATING GATES; MEMORY SCALING; VERTICAL MEMORY CELL;

DATA STORAGE EQUIPMENT;

EID: 0029513609     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)