Heuristic method for phase-conflict minimization in automatic phase-shift mask design

Japanese Journal of Applied Physics

Volumn 34, Issue 12, 1995, Pages 6584-6589

  Moniwa, Akemi ^a   Terasawa, Tsuneo ^a   Nakajo, Kyoji ^a   Sakemi, Jun’Ya ^a   Okazaki, Shinji ^a  

^a HITACHI LTD   (Japan)

Author keywords

Alternate type phase shift mask; Computer system; Minimization of phase conflict; Shifter placement; Undirected graph

Indexed keywords

ALGORITHMS; COMPUTER SOFTWARE; GRAPH THEORY; HEURISTIC METHODS; OPTIMIZATION; PHOTOLITHOGRAPHY;

ALTERNATE TYPE PHASE SHIFT MASK; PHASE CONFLICT; SHIFTER PLACEMENT PROGRAM;

MASKS;

EID: 0029512083     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.34.6584     Document Type: Article

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