Silicon micromachined floating-element shear-stress sensor with optical position sensing by photodiodes

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 436-439

  Padmanabhan, A ^a   Goldberg, H D ^a   Breuer, K S ^a   Schmidt, M A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; BOUNDARY LAYER FLOW; FLOW OF FLUIDS; INTERFACES (MATERIALS); MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; NAVIER STOKES EQUATIONS; OPTICAL SENSORS; PHOTODIODES; SHEAR STRESS; SILICON WAFERS; TURBULENT FLOW;

FLOATING ELEMENT SHEAR STRESS SENSOR; OPTICAL POSITION SENSING; TURBULENT BOUNDARY LAYER;

SILICON SENSORS;

EID: 0029510962     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)