Optimized temperature pulse sequences for the enhancement of chemically-specific response patterns from micro-hotplate gas sensors

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 823-826

  Cavicchi, R E ^a   Suehle, J S ^a   Kreider, K G ^a   Gaitan, M ^a   Chaparala, P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONDUCTIVE MATERIALS; ELECTRIC CONTACTS; FABRICATION; HEATING EQUIPMENT; MICROMACHINING; OPTIMIZATION; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; SOLID STATE DEVICES; TEMPERATURE; THERMAL GRADIENTS;

MICROHOTPLATE GAS SENSORS; POLYSILICON HEATER; TEMPERATURE PROGRAMS;

CHEMICAL SENSORS;

EID: 0029510945     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)