Surface micromachined diaphragm pressure sensors with optimized piezoresistive sensing resistors

IEEE Region 10 Annual International Conference, Proceedings/TENCON

Volumn , Issue , 1995, Pages 24-27

  Lin, Liwei ^a   Yun, Weijie ^a   Chu, Huey Chi ^a   Chiao, Mu ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; FABRICATION; MICROMACHINING; OPTIMIZATION; PRESSURE; RESISTORS; SEMICONDUCTING SILICON; SUBSTRATES;

DIAPHRAGM PRESSURE SENSORS; PIEZORESISTIVE SENSING RESISTORS; SURFACE MICROMACHINING;

SENSORS;

EID: 0029510594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)