Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface

IEEE Symposium on VLSI Circuits, Digest of Technical Papers

Volumn , Issue , 1995, Pages 45-46

  Malcovati, P ^a   Haberli, A ^a   Mayer, F ^a   Paul, O ^a   Maloberti, F ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; ATMOSPHERIC HUMIDITY; CMOS INTEGRATED CIRCUITS; FLOW OF FLUIDS; INTEGRATION; INTERFACES (COMPUTER); MICROPROCESSOR CHIPS; MODULATORS; READOUT SYSTEMS;

AIR FLOW; AIR HUMIDITY; BATCH FABRICATED MULTI-SENSOR CHIP; CAPACITIVE RELATIVE HUMIDITY SENSOR; CMOS MICROSENSOR; READOUT CIRCUIT; SECOND ORDER SIGMA-DELTA A/D CONVERTER; THERMOELECTRIC GAS FLOW SENSOR;

SENSORS;

EID: 0029510063     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)