Particle beam mass spectrometry of submicron particles formed during LPCVD of polysilicon films

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1995, Pages 22-29

  Ziemann, Paul J ^a   Liu, Peng ^a   Nijhawan, Sandeep ^a   Kittelson, David B ^a   McMurry, Peter H ^a   Campbell, Stephen A ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; MASS SPECTROMETRY; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER); POLYMERS;

PARTICLE BEAM MASS SPECTROMETRY; POLYSILICON FILMS; SUBMICRON PARTICLES;

CHEMICAL VAPOR DEPOSITION;

EID: 0029508085     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)