Miniaturised polarisation sensor as a concept for new optical microsystems

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 160-162

  Stenkamp, B ^a   Abraham, M ^a   Amato, J P ^a   Zetterer, Th ^a   Pokrowsky, P ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; LIGHT POLARIZATION; MICROELECTRONIC PROCESSING; MINIATURE INSTRUMENTS; OPTOELECTRONIC DEVICES; POLARIMETERS; PROCESS CONTROL; THIN FILMS;

CONE POLARIMETER; MINIATURIZED ELLIPSOMETER; MINIATURIZED POLARIZATION SENSOR; OPTICAL MICROSYSTEMS;

OPTICAL SENSORS;

EID: 0029493142     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)