Tensile testing of epitaxial silicon films

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 96-99

  Cunningham, Shawn J ^a   Suwito, Wan ^a   Read, David T ^a  

^a Ford Microelectronics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELASTIC MODULI; EPITAXIAL GROWTH; ERRORS; ETCHING; FABRICATION; FAILURE (MECHANICAL); MATHEMATICAL MODELS; SEMICONDUCTING SILICON; STRAIN; STRESSES; TENSILE TESTING;

ANISOTROPIC ETCHING; ELONGATION; FORCE; POISSON RATIO;

THIN FILMS;

EID: 0029493141     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)