Fast sparse aerial-image calculation for OPC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2621, Issue , 1995, Pages 534-545

  Cobb, Nicolas B ^a   Zakhor, Avideh ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AERIAL IMAGE CALCULATION; MANHATTAN GEOMETRY; OPTICAL PROXIMITY CORRESTION; PHOTOMASKS;

IMAGING TECHNIQUES; MATHEMATICAL MODELS; PERTURBATION TECHNIQUES; PHOTORESISTS;

MASKS;

EID: 0029492542     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)