Tower structure Si filed emitter arrays with large emission current

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1995, Pages 393-396

  Hori, Yoshikazu ^a   Koga, Keisuke ^a   Sakiyama, Kazuyuki ^a   Kanemaru, Seigo ^a   Itoh, Junji ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRODES; FABRICATION; FINITE ELEMENT METHOD; GATES (TRANSISTOR); SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; VLSI CIRCUITS;

FIELD EMITTER ARRAYS; LOW VOLTAGE OPERATION;

SEMICONDUCTOR DEVICES;

EID: 0029492048     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)