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Volumn 42, Issue 6, 1995, Pages 1750-1757

Effect of Electron Traps on Reversibility of Annealing

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON ENERGY LEVELS; ELECTRONS; GATES (TRANSISTOR); RADIATION EFFECTS; SILICA;

EID: 0029491544     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/23.488775     Document Type: Article
Times cited : (6)

References (19)
  • 3
    • 0024913722 scopus 로고
    • The Nature of the Trapped Hole Annealing Process
    • A. J. Lelis, H. E. Boesch, T. R. Oldham, F. B. McLean, “The Nature of the Trapped Hole Annealing Process”, IEEE Trans. Nucl. Sci., NS-36, No. 6, p. p. 1808–1815 (1989).
    • (1989) IEEE Trans. Nucl. Sci. , vol.NS-36 , Issue.6 , pp. 1808-1815
    • Lelis, A.J.1    Boesch, H.E.2    Oldham, T.R.3    McLean, F.B.4
  • 4
    • 0028726796 scopus 로고
    • Time Dependence of Switching Oxide Traps
    • A. J. Lelis, T. R. Oldham, “Time Dependence of Switching Oxide Traps”, IEEE Trans. Nucl. Sci., NS-41, No. 6, pp. 1835–1843 (1994).
    • (1994) IEEE Trans. Nucl. Sci. , vol.NS-41 , Issue.6 , pp. 1835-1843
    • Lelis, A.J.1    Oldham, T.R.2
  • 5
    • 0027809459 scopus 로고
    • Experimental Evidence of Two Species of Radiation Induced Trapped Positive Charge
    • And “Evidence for Two Types of Radiation-Induced Trapped Positive Charge”, IEEE Trans. Nucl. Sci., NS-41, No. 6, p. p. 1828–1834 (1994)
    • F. K. Freitag, D. B. Brown, C. M. Dozier, Experimental Evidence of Two Species of Radiation Induced Trapped Positive Charge”, IEEE Trans. Nucl. Sci., NS-40, No. 6, p. p. 1316–1322 (1993). And “Evidence for Two Types of Radiation-Induced Trapped Positive Charge”, IEEE Trans. Nucl. Sci., NS-41, No. 6, p. p. 1828–1834 (1994).
    • (1993) IEEE Trans. Nucl. Sci. , vol.NS-40 , Issue.6 , pp. 1316-1322
    • Freitag, F.K.1    Brown, D.B.2    Dozier, C.M.3
  • 6
    • 36449004449 scopus 로고
    • Positive Charge Generation in Metal-Oxide-Semiconductor Capacitors
    • L. P. Trombetta, F. J. Feigl, and R. J. Zeto, “Positive Charge Generation in Metal-Oxide-Semiconductor Capacitors,” J. Appl. Phys., Vol. 69, p. p. 2512–2521 (1991)
    • (1991) J. Appl. Phys. , vol.69 , pp. 2512-2521
    • Trombetta, L.P.1    Feigl, F.J.2    Zeto, R.J.3
  • 7
    • 0345221452 scopus 로고
    • Tunnelling and Thermal Emission of Electrons from a Distribution of Shallow Traps in SiO2
    • S. E. Thompson, T. Nishida, “Tunnelling and Thermal Emission of Electrons from a Distribution of Shallow Traps in SiO2,” Appl. Phys. Lett., Vol. 58, p. p. 1262–1264 (1991).
    • (1991) Appl. Phys. Lett. , vol.58 , pp. 1262-1264
    • Thompson, S.E.1    Nishida, T.2
  • 9
    • 0025597502 scopus 로고
    • Time-Dependent Hole and Electron Trapping Effects in SIMOX Buried Oxides
    • H. E. Boesch, Jr., T. L. Taylor, L. R. Hite, W. E. Bailey, “Time-Dependent Hole and Electron Trapping Effects in SIMOX Buried Oxides,” IEEE Trans. Nucl. Sci., NS-37, No. 6, p. p. 1982–1989 (1990).
    • (1990) IEEE Trans. Nucl. Sci. , vol.NS-37 , Issue.6 , pp. 1982-1989
    • Boesch, H.E.1    Taylor, T.L.2    Hite, L.R.3    Bailey, W.E.4
  • 12
    • 0021602022 scopus 로고
    • MOSFET and MOS Capacitor Responses to Ionizing Radiation
    • J. M. Benedetto, H. E. Boesch, “MOSFET and MOS Capacitor Responses to Ionizing Radiation,” IEEE Trans. Nucl. Sci., NS-31, No. 6, p. p. 1461–1466 (1984).
    • (1984) IEEE Trans. Nucl. Sci. , vol.NS-31 , Issue.6 , pp. 1461-1466
    • Benedetto, J.M.1    Boesch, H.E.2
  • 13
    • 0021609193 scopus 로고
    • A Simple Model for Separating Interface and Oxide Charge Effects in MOS Device Characteristics
    • K. F. Galloway, H. Gaitan, R. J. Russel, “A Simple Model for Separating Interface and Oxide Charge Effects in MOS Device Characteristics,” IEEE Trans. Nucl. Sci., NS-31, No. 6, p. p. 1497–1501 (1984).
    • (1984) IEEE Trans. Nucl. Sci. , vol.NS-31 , Issue.6 , pp. 1497-1501
    • Galloway, K.F.1    Gaitan, H.2    Russel, R.J.3
  • 14
    • 0005123159 scopus 로고
    • Radiation-Induced Charge Neutralization and Interface Trap Build-up in Metal-Oxide-Semiconductor Devices
    • Jan
    • D. M. Fleetwood, “Radiation-Induced Charge Neutralization and Interface Trap Build-up in Metal-Oxide-Semiconductor Devices,” J. Appl. Phys., Vol. 67 (1), p. p. 580–583 (Jan 1990).
    • (1990) J. Appl. Phys. , vol.67 , Issue.1 , pp. 580-583
    • Fleetwood, D.M.1
  • 16
    • 0020751109 scopus 로고
    • Interface Trap Generation in Silicon Dioxide When Electrons are Captured by Trapped Holes
    • S. K. Lai, “Interface Trap Generation in Silicon Dioxide When Electrons are Captured by Trapped Holes”, J. Appl. Phys., Vol. 54, p. p. 2540–2546 (1983).
    • (1983) J. Appl. Phys. , vol.54 , pp. 2540-2546
    • Lai, S.K.1
  • 17
  • 18
    • 0026222822 scopus 로고
    • Radiation-Induced Neutral Electron Trap Generation in Electrically Biased Insulated Gate Field Effect Transistor Gate Insulators
    • M. Walters, A. Reisman, “Radiation-Induced Neutral Electron Trap Generation in Electrically Biased Insulated Gate Field Effect Transistor Gate Insulators,” J. Electrochem. Soc., Vol. 138, No. 9, p. p. 2756–2762 (1991).
    • (1991) J. Electrochem. Soc. , vol.138 , Issue.9 , pp. 2756-2762
    • Walters, M.1    Reisman, A.2
  • 19
    • 36449003367 scopus 로고
    • Electron-Spin-Resonance Evidence for an Impurity-Related E'-like hole trapping defect in thermally grown SiO2 on Si
    • J. F. Conley, P. M. Lenahan, H. L. Evans, R. K. Lowry, T. J. Morthorst, “Electron-Spin-Resonance Evidence for an Impurity-Related E'-like hole trapping defect in thermally grown SiO2 on Si,” J. Appl. Phys., Vol. 76 (12), p. p. 8186–8188 (1994).
    • (1994) J. Appl. Phys. , vol.76 , Issue.12 , pp. 8186-8188
    • Conley, J.F.1    Lenahan, P.M.2    Evans, H.L.3    Lowry, R.K.4    Morthorst, T.J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.