Multi-layer eddy current micro sensor for non-destructive inspection of small diameter pipes

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 136-139

  Hamasaki, Yukio ^a   Ide, Takahiro ^a  

^a TOKYO GAS CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EDDY CURRENTS; FABRICATION; FINITE ELEMENT METHOD; INSPECTION; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; NONDESTRUCTIVE EXAMINATION; THREE DIMENSIONAL;

EDDY CURRENT MICROSENSOR; MICRO SPIRAL COIL;

SENSORS;

EID: 0029490502     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)